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Case | Reducing energy consumption by 60%, how Zhaohua enables semiconductor companies to achieve efficient energy-saving VOCs solutions

Semiconductor industry VOCs The main sources of waste gas are from processes such as photolithography, development, etching, and diffusion. In these processes, the solvents used, such as cleaning agents, developers, photoresists, and etching liquids, contain a large amount of organic components. A large-scale integrated circuit chip manufacturing company in Shanghai needs to effectively manage waste gas to improve its workshop environment. Megaunity designed and implemented a set of VOCs management systems for the enterprise, and the concentration of exhaust gas after system treatment is far below national and local standards, while significantly reducing the operating costs of the enterprise.

Sources and characteristics of waste gas

The waste gas in this project mainly comes from the organic waste gas generated during the cleaning, coating, developing, and wet stripping processes in integrated circuit manufacturing.

(1) The concentration of organic matter in the waste gas is relatively low, and the air volume is large. The air volume of the waste gas 85000Nm³/h, concentration 150mg/m³.

(2) The oxidation of organosilicon in the waste gas can generate silica, which may block RTO and zeolite wheels.

(3) The waste gas contains photoresist, and long-term operation can cause blockages in subsequent pipelines, equipment, and chimneys.

Megaunity solution

In response to the characteristics of the customer's workshop exhaust gas, Megaunity adopted a specially designed pretreatment+zeolite wheel system+RTO+waste heat utilization system, and the concentration of emissions after treatment is consistently below 5mg/m³, with emission control indicators far superior to the latest national and local emission standards.

(1) The project adopted KPR+RTO process, which can save nearly one million cubic meters of natural gas consumption annually compared to theTOfurnace treatment process in other customer plants.

(2) The project has set up an emergency emission bypass backup system, which can ensure workshop exhaust during system maintenance, avoiding losses in the semiconductor industry.

(3) A pipeline burner is used instead of a heat exchanger to avoid blockage of the heat exchange system and zeolite wheel.

(4) Megaunity private cloud platform service, real-time monitoring of stable operation, continuous compliance with waste gas emissions.

Project highlights

Some components in the waste gas of the semiconductor industry can easily lead to blockages in pipelines and equipment. When choosing VOCs a solution, attention should be paid to the selection of pretreatment and thermal energy utilization schemes; if inappropriate measures are taken, it can easily cause irreparable impacts and damage to the equipment during the operation phase. Megaunity can customize system design and optimization for customers based on actual working conditions, helping enterprises solve waste gas treatment problems, continuously create value for customers, and assist in achieving carbon neutrality goals.

Industrial Air Handling System Solutions Provider

Tel：400-860-5288

E-mail： marketing@megaunity.com

Address:

No.300, Dongxin Road, Wuzhong District, Suzhou, Jiangsu, China
No.8, Shuzi 3rd Road, DD Port, Dalian Jinpu New Area, Liaoning, China

苏公网安备32050602012408号

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