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VOCs Treatment Project for Semiconductor Integrated Circuit Workshop

Semiconductor industryVOCs waste gas The main sources are from processes such as photolithography, development, etching, and diffusion. In these processes, the solvents used, such as cleaning agents, developers, photoresists, and etching liquids, contain a large amount of organic components. A large-scale integrated circuit chip manufacturing company in Shanghai needs to effectively treat waste gas to improve its workshop environment. For the characteristics of the waste gas in this project, Megaunity designed and implemented a VOCs treatment system for the enterprise, and the concentration of the exhaust gas after treatment is far below national and local standards, while significantly reducing the operating costs of the enterprise.

Sources and characteristics of waste gas

The waste gas in this project mainly comes from the organic waste gas generated during the cleaning, coating, developing, and wet stripping processes in integrated circuit manufacturing.

(1) The concentration of organic substances in the waste gas is relatively low, and the air volume is large. The waste gas volume is 85000Nm³/h, concentration 150mg/m³.

(2) The organic silicon in the waste gas can oxidize to form silicon dioxide, which may blockRTO and zeolite wheels..

(3) The waste gas contains photoresist, and long-term operation can cause blockages in subsequent pipelines, equipment, and chimneys.

Megaunity solution

In response to the characteristics of the customer's workshop exhaust gas, Megaunity adopted a specially designedpre-treatment + zeolite wheel system + RTO + waste heat utilization system, with the emission concentration after treatment consistently below 5mg/m³, and the treatment emission indicators far exceed the latest national and local emission standards.

(1) The KPR + RTO process was adopted, which can save nearly one million cubic meters of natural gas consumption annually compared to the TO furnace treatment process in other customer plants.

(2) The project has set up an emergency emission bypass backup system, which can ensure workshop exhaust during system maintenance, avoiding losses in semiconductor industry production.

(3) A pipeline burner was used instead of a heat exchanger to avoid blockages in the heat exchange system and zeolite wheel.

(4) Megaunityprivate cloud platform service, real-time monitoring of stable operation, continuous compliance with waste gas emissions.

Some components in the waste gas of the semiconductor industry can easily lead to blockages in pipelines and equipment. When selecting VOCs solutions, attention should be paid to the choice of pre-treatment and thermal energy utilization schemes; if improper measures are taken, it can easily cause irreparable impacts and damage to the equipment during the operation phase. Megaunity can customize system design and optimization for customers based on actual working conditions, helping enterprises solve waste gas treatment problems, continuously create value for customers, and assist in achieving carbon neutrality goals.

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